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CSMNT2015优秀论文大赏(四)

日期:2017年10月10日 10:23

Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance

 

 

论文摘要

 

The LC resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copper-electroplated planar inductor. The sensor is fabricated using silicon bulk micro-machining, electroplating, and anodic bonding technology. The finite element method is used to model the deflection of the silicon diaphragm and extract the capacitance change corresponding to the applied pressure. Within the measurement range from 5 to 100 kPa, the sensitivity of the sensor is 0.052 MHz/kPa, the linearity is 2.79%, and the hysteresis error is 0.2%. Compared with the sensitivity at 27 °C, the drop of output performance is 3.53% at 140 °C.

 

关键词

pressure sensor; LC resonance; wireless

作者

Cheng Zheng, Wei Li, An-Lin Li, Zhan Zhan, Ling-Yun Wang  and 

Dao-Heng Sun

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所属类别: 学会动态

该资讯的关键词为:

 

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